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Wave front sensing for metrology by using optical filter

Authors :
Gerald Fütterer
Source :
Sixth European Seminar on Precision Optics Manufacturing.
Publication Year :
2019
Publisher :
SPIE, 2019.

Subjects

Subjects :
Wavefront
Materials science
Optics
business.industry
Optical filter
business
Metrology

Details

Database :
OpenAIRE
Journal :
Sixth European Seminar on Precision Optics Manufacturing
Accession number :
edsair.doi...........c9299bf7293da3c90824298f12cf69c0
Full Text :
https://doi.org/10.1117/12.2530013
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