Back to Search Start Over

Annular grain structures in pulsed laser recrystallized Si on amorphous insulators

Authors :
L. E. Trimble
T. T. Sheng
George K. Celler
Harry J. Leamy
Source :
Applied Physics Letters. 39:425-427
Publication Year :
1981
Publisher :
AIP Publishing, 1981.

Abstract

Polycrystalline silicon films on SiO2 and Si3N4 may be processed by tightly focused, overlapping laser pulses to yield large‐grained (1–5μm) material. In individual nonoverlapping spots the large grains are arranged in concentric rings whose origin is clarified in this letter.

Details

ISSN :
10773118 and 00036951
Volume :
39
Database :
OpenAIRE
Journal :
Applied Physics Letters
Accession number :
edsair.doi...........c8032a105836aa4c3a9d44cefc91293f
Full Text :
https://doi.org/10.1063/1.92760