Laser Damage Thresholds of Thin Film Optical Coatings at 248 nm

We have measured the laser-induced damage thresholds for 248 nm wavelength light of over 100 optical coatings from commercial vendors and research institutions. All samples were irradiated once per damage site with temporally multi-lobed, 20-ns pulses generated by a KrF laser. The survey included high, partial, and dichroic reflectors, anti-reflective coatings, and single layer films. The samples were supplied by ten vendors. The majority of samples tested were high reflectors and antireflective coatings. The highest damage thresholds were 8.5 to 9.4 J/cm/sup 2/, respectively. Although these represent extremes of what has been tested so far, several vendors have produced coatings of both types with thresholds which consistently exceed 6 J/cm/sup 2/. Repeated irradiations of some sites were made on a few samples. These yielded no degradation in threshold, but in fact some improvement in damage resistance. These same samples also exhibited no change in threshold after being retested seven months later.