Complex Electron-Ion-Plasma Processing of Aluminum Surface in a Single Vacuum Cycle

The principle of operation and major characteristics of a laboratory setup designed for electron-ion-plasma surface modification of materials and parts in a single vacuum cycle are presented. Using an Al–Ti system as an example, a possibility of a multiple improvement of mechanical (microhardness) and tribological (wear resistance and friction coefficient) properties of a material formed as a result of a comprehensive treatment in a single vacuum cycle, combining the formation of an A7 technical-grade aluminum surface layer alloyed with titanium via a deposition – irradiation scheme (number of cycles from 1 to 20; metal film thickness per cycle 0.5 and 1 μm) followed by a subsequent electron-ion nitriding (540°С, 8 h) of the resulting surface alloy in the plasma of a non-self-sustained discharge by the ion and electron plasma components is demonstrated.