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Large optics ion figuring

Authors :
Roland Geyl
Andre Rinchet
Emmanuel Rolland
Source :
SPIE Proceedings.
Publication Year :
1999
Publisher :
SPIE, 1999.

Abstract

In 1994, REOSC took the decision to set up a large optics Ion figuring facility to be operational within 18 months. The equipment was designed to be able to accept components up to the maximum dimensions of 1.3 X 1.3 X 1.3 meters mounted in a high-vacuum chamber. After a period of design, fabrication, installation and validation, the Ion Beam Facility came is now, since more than two years, fully integrated in our production line as an efficient complementary technique to the mechanical polishing. We present in this paper some experimental results showing the maturity of the technology as well as some recent improvements and future applications.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
SPIE Proceedings
Accession number :
edsair.doi...........c6c5d877d3a900c16aa9c7a35ea7865c
Full Text :
https://doi.org/10.1117/12.360141