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Design and experiment analysis for micro needle-cylinder discharge chip integrated by open-type ion source and micro pump
- Source :
- Optics and Precision Engineering. 25:1567-1576
- Publication Year :
- 2017
- Publisher :
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2017.
Details
- ISSN :
- 1004924X
- Volume :
- 25
- Database :
- OpenAIRE
- Journal :
- Optics and Precision Engineering
- Accession number :
- edsair.doi...........c6c04aa2742987e5ce84ee2de7e6e21b