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Sputter deposition technology for Al(1−x)ScxN films with high Sc concentration
- Source :
- 2017 China Semiconductor Technology International Conference (CSTIC).
- Publication Year :
- 2017
- Publisher :
- IEEE, 2017.
-
Abstract
- Aluminium scandium nitride (Al 1−x Sc x N) with its strongly enhanced piezoelectric response is the upcoming piezoelectric material of choice in next generation RF filters, sensors, actuators and energy harvesting devices. This paper will concentrate on the deposition technology for Al 1−x Sc x N films with high Sc content. Films with Sc concentrations close to 43 at% have been grown on 200-mm substrates using a cluster type sputter deposition tool. The piezoelectric response will be discussed and correlated with the deposition parameters and film structural properties. The steps required to deliver a high-volume production solution for high Sc concentration will be described.
- Subjects :
- Scandium nitride
Materials science
Metallurgy
Analytical chemistry
chemistry.chemical_element
02 engineering and technology
Sputter deposition
021001 nanoscience & nanotechnology
01 natural sciences
Piezoelectricity
chemistry
Aluminium
0103 physical sciences
Electrode
0210 nano-technology
010301 acoustics
Deposition (chemistry)
Energy harvesting
Cluster type
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2017 China Semiconductor Technology International Conference (CSTIC)
- Accession number :
- edsair.doi...........c56ab954630ef0b63bfb99aa57ae875b