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Performance and Reliability of MIM (Metal-Insulator-Metal) Capacitors with ZrO2 for 50nm DRAM Application

Authors :
Ki-Vin Im
Jea-Hyun Yeo
Cha-young Yoo
Kyoung-Ryul Yoon
Young-Min Kim
Joo-Tae Moon
Eun-ae Chung
U-In Chung
Sung-tae Kim
Source :
Extended Abstracts of the 2005 International Conference on Solid State Devices and Materials.
Publication Year :
2005
Publisher :
The Japan Society of Applied Physics, 2005.

Subjects

Subjects :
Materials science
Reliability (semiconductor)
business.industry
Optoelectronics
Metal insulator metal capacitor
business
Dram

Details

Database :
OpenAIRE
Journal :
Extended Abstracts of the 2005 International Conference on Solid State Devices and Materials
Accession number :
edsair.doi...........c5461e0c784ce45b06ecf85baef13f70
Full Text :
https://doi.org/10.7567/ssdm.2005.h-1-4
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