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Low Damage Sample Preparation of Semiconductor Materials Using Low Energy Ion Milling

Authors :
Wen-An Chiou
Daniel Flatoff
Shane Roberts
Source :
Microscopy and Microanalysis. 9:810-811
Publication Year :
2003
Publisher :
Oxford University Press (OUP), 2003.

Subjects

Subjects :
Materials science
Low energy
Semiconductor materials
Metallurgy
Analytical chemistry
Sample preparation
Ion milling machine
Instrumentation

Details

ISSN :
14358115 and 14319276
Volume :
9
Database :
OpenAIRE
Journal :
Microscopy and Microanalysis
Accession number :
edsair.doi...........c4f04c9b8e3b9ab77fd53d1e92f143df
Full Text :
https://doi.org/10.1017/s143192760344405x
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