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Chip based wide range planar optical spectrometer
- Source :
- 2019 14th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT).
- Publication Year :
- 2019
- Publisher :
- IEEE, 2019.
-
Abstract
- This paper proposed a micro-optical wavelength splitting element, which is controlled by the length of the Fabry-Perot optical cavity to select the wavelength range of the required interference filtering, and by means of a microactuator. Make a planar chip based optical spectrometer with ultra small in size and more suitable for developing into customer end product.
Details
- Database :
- OpenAIRE
- Journal :
- 2019 14th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)
- Accession number :
- edsair.doi...........c4d6e7d1c815f5acf0ac810ae38bbe8d