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Yield Property Characterization for Au and TiN Thin Films by Applying Nanoindentation Technique

Authors :
Yun Hee Lee
Yong Hak Huh
Ju Young Kim
Seung Hoon Nahm
Jae Il Jang
Dong Il Kwon
Publication Year :
2006
Publisher :
Trans Tech Publications Ltd., 2006.

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Database :
OpenAIRE
Accession number :
edsair.doi...........c4881abdfbce319a6695e5729285bb5a

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