Photo-resist ashing by atmospheric pressure glow discharge

MLA

Kun H. Han, et al. “Photo-Resist Ashing by Atmospheric Pressure Glow Discharge.” Current Applied Physics, vol. 7, Feb. 2007, pp. 211–14. EBSCOhost, https://doi.org/10.1016/j.cap.2006.04.002.

APA

Kun H. Han, Bang K. Kang, Jung G. Kang, & Han S. Uhm. (2007). Photo-resist ashing by atmospheric pressure glow discharge. Current Applied Physics, 7, 211–214. https://doi.org/10.1016/j.cap.2006.04.002

Chicago

Kun H. Han, Bang K. Kang, Jung G. Kang, and Han S. Uhm. 2007. “Photo-Resist Ashing by Atmospheric Pressure Glow Discharge.” Current Applied Physics 7 (February): 211–14. doi:10.1016/j.cap.2006.04.002.