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Surface acoustic wave temperature sensor based on Pt/AlN/4 H-SiC structure for high-temperature environments
- Source :
- Sensors and Actuators A: Physical. 357:114379
- Publication Year :
- 2023
- Publisher :
- Elsevier BV, 2023.
Details
- ISSN :
- 09244247
- Volume :
- 357
- Database :
- OpenAIRE
- Journal :
- Sensors and Actuators A: Physical
- Accession number :
- edsair.doi...........c44f72e84f297a8271b1bf17e66b3cb5