Surface acoustic wave temperature sensor based on Pt/AlN/4 H-SiC structure for high-temperature environments

Authors :: Zuodong Yang
Fang Wang
Weican Nie
Xu Han
Xiaowei Guo
Xin Shan
Xin Lin
Hongyu Dun
Zheng Sun
Yangyang Xie
Kailiang Zhang
Source :: Sensors and Actuators A: Physical. 357:114379
Publication Year :: 2023
Publisher :: Elsevier BV, 2023.

Subjects :: Metals and Alloys
Electrical and Electronic Engineering
Condensed Matter Physics
Instrumentation
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

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