Evaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures

MLA

Takahito Ono, et al. “Evaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures.” Journal of Microelectromechanical Systems, vol. 30, Aug. 2021, pp. 560–68. EBSCOhost, https://doi.org/10.1109/jmems.2021.3076791.

APA

Takahito Ono, Nguyen Van Toan, Masaya Toda, Hideki Hayashi, & Naoki Inomata. (2021). Evaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures. Journal of Microelectromechanical Systems, 30, 560–568. https://doi.org/10.1109/jmems.2021.3076791

Chicago

Takahito Ono, Nguyen Van Toan, Masaya Toda, Hideki Hayashi, and Naoki Inomata. 2021. “Evaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures.” Journal of Microelectromechanical Systems 30 (August): 560–68. doi:10.1109/jmems.2021.3076791.