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Effect of the inertial term of the ion momentum equation on fluid transport simulation for capacitively coupled plasma sources

Authors :
Yongil Lee
Jeong Eun Choi
Sang Jeen Hong
Sang-Young Chung
Won-Seok Chang
Yeong-Geun Yook
Jung-Sik Yoon
Deuk-Chul Kwon
Source :
Current Applied Physics. 42:31-37
Publication Year :
2022
Publisher :
Elsevier BV, 2022.

Subjects

Subjects :
General Physics and Astronomy
General Materials Science

Details

ISSN :
15671739
Volume :
42
Database :
OpenAIRE
Journal :
Current Applied Physics
Accession number :
edsair.doi...........c3dce768df777d772b22cdeb5eabb13a

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