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Monochromatic imaging and angular distribution measurements of extreme ultraviolet light from laser-produced Sn and SnO2 plasmas
- Source :
- Applied Physics Letters. 85:1919-1921
- Publication Year :
- 2004
- Publisher :
- AIP Publishing, 2004.
-
Abstract
- Properties of extreme ultraviolet (EUV) emission from laser-produced Sn and SnO2 plasmas were investigated. EUV emission images were taken with a monochromatic imager for 13.5nm with 4% bandwidth. It was found that the EUV emitting plasma is not formed symmetrically with respect to the target surface normal but extends toward laser incident axis. This result is consistent with the angular distribution of EUV emission peaked toward the direction nearly perpendicular to the laser axis. The asymmetric plasma can be attributed to the interaction of a long laser pulse with expanding plasma along the path of laser incidence.
- Subjects :
- Physics
Physics and Astronomy (miscellaneous)
business.industry
Extreme ultraviolet lithography
media_common.quotation_subject
Physics::Optics
Plasma
Laser
Asymmetry
law.invention
Optics
Angular distribution
Physics::Plasma Physics
law
Extreme ultraviolet
Physics::Space Physics
Perpendicular
Astrophysics::Solar and Stellar Astrophysics
Monochromatic color
Atomic physics
business
media_common
Subjects
Details
- ISSN :
- 10773118 and 00036951
- Volume :
- 85
- Database :
- OpenAIRE
- Journal :
- Applied Physics Letters
- Accession number :
- edsair.doi...........c33f86065cefc5096a086be2546cc622