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XUV laser mass spectrometry for nano-scale 3D elemental profiling of functional thin films
- Source :
- Applied Physics A. 126
- Publication Year :
- 2020
- Publisher :
- Springer Science and Business Media LLC, 2020.
-
Abstract
- Direct nano-scale microanalysis is important for photovoltaic functional thin films to characterize their homogeneity and purity. This demands combining spatial resolution in the micro/nano-scale and sensitivity in the trace-level range, which is at the moment beyond state-of-the-art. As dictated by counting statistics, the reduction of the spot size degrades the detection limit. The utilization of a tabletop XUV laser at λ = 46.9 nm has shown to dramatically improve the ablation efficiency with respect to that of visible lasers, such that ablation spot of 1 μm limits. Li-doped Cu2ZnSn(S,Se)4 (so-called kesterite) thin films were irradiated across 3D ablation arrays for hyperspectral mapping by means of time-of-flight mass spectrometry. The nominal 3D data node lattices were the initialisation perceptron, filled with measured values, and for a detailed supervised learning postprocessing, the node-to-node links were analysed by means of a 2D-kernel covariance algorithm. The latter permitted to obtain robust 3D elemental distribution functions well below the measurement spacing, giving insights into the inhomogeneity and impurities.
- Subjects :
- Chemical imaging
Materials science
business.industry
010401 analytical chemistry
General Chemistry
engineering.material
010402 general chemistry
Mass spectrometry
Laser
01 natural sciences
Microanalysis
0104 chemical sciences
law.invention
Optics
law
Extreme ultraviolet
engineering
General Materials Science
Kesterite
Thin film
business
Image resolution
Subjects
Details
- ISSN :
- 14320630 and 09478396
- Volume :
- 126
- Database :
- OpenAIRE
- Journal :
- Applied Physics A
- Accession number :
- edsair.doi...........c33ebbc778416aac4b6b4c1e41efda79