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Plasma cleaning of carbonaceous samples using a shield

Authors :
Dominique Schryvers
A. C. Robins
Paul E. Fischione
Bert Willems
Ann-Lenaig Hamon
Joseph M. Matesa
Source :
Microscopy and Microanalysis. 9:164-165
Publication Year :
2003
Publisher :
Oxford University Press (OUP), 2003.

Abstract

Plasma cleaning is a useful technique to clean transmission electron microscopy (TEM) sample surfaces from carbon hydroxide. However, selective material removal rates can be hard to establish. As a result, carbonaceous samples are significantly impacted by the plasma process since by the very nature of an oxygen plasma it chemically reacts with carbon structures. We propose the use of a shield, provided by Fischione Instruments, to see whether this reduces significantly the plasma cleaning speed without reducing its effectiveness and without the need for a delicate tuning of the gas mixture or instrumentation parameters. Plasma cleaning could then be applied to carbonaceous samples such as graphite, diamond, amorphous carbon films as well as to any sort of powder deposited on holey carbon films. Tests were performed by electron energy-loss spectroscopy (EELS) using a post-column GIF attached to a Philips CM 30-UT and by high resolution imaging (HREM) with a top-entry JEOL 4000 EX.

Details

ISSN :
14358115 and 14319276
Volume :
9
Database :
OpenAIRE
Journal :
Microscopy and Microanalysis
Accession number :
edsair.doi...........c277acde6a75ece7cabd8f3b014cec26
Full Text :
https://doi.org/10.1017/s143192760301626x