Plasma Doping optimizing knock-on effect

MLA

Koukou Suu, et al. “Plasma Doping Optimizing Knock-on Effect.” 2014 20th International Conference on Ion Implantation Technology (IIT), June 2014. EBSCOhost, https://doi.org/10.1109/iit.2014.6940025.

APA

Koukou Suu, Kazuhiko Tonari, & Kouji Suzuki. (2014). Plasma Doping optimizing knock-on effect. 2014 20th International Conference on Ion Implantation Technology (IIT). https://doi.org/10.1109/iit.2014.6940025

Chicago

Koukou Suu, Kazuhiko Tonari, and Kouji Suzuki. 2014. “Plasma Doping Optimizing Knock-on Effect.” 2014 20th International Conference on Ion Implantation Technology (IIT), June. doi:10.1109/iit.2014.6940025.