Numerical simulation and experimentation of adjusting the curvatures of micro-cantilevers using the water-confined laser-generated plasma

This paper describes a precise and non-contact adjustment technique using the water-confined laser-generated plasma to adjust the curvature of micro-components (micro-mechanical cantilevers). A series of laser shock micro-adjustment experiments were conducted on 0.4 mm-thick Al samples using pulsed Nd:YAG lasers operating at 1064 nm wavelengths to verify the technical feasibility. Systematic study was carried out in the term of effects of various factors on the adjusting results, including laser energies, laser focus positions, laser shock times and confined regime configuration. The research results have shown that the different bending angles and bending directions can be obtained by changing the laser processing parameters. And, for the adjustment process, the absence of confined regime configuration could also generate suitable bending deformation. But, in the case of larger energy, the final surfaces would have the sign of ablation, hence resulting in poor surface quality. An analysis procedure including dynamic analysis performed by ANSYS/LS-DYNA and static analysis performed by ANSYS is presented in detail to attain the simulation of laser shock micro-adjustment to predict the final bending deformation. The predicted bending profiles is well correlated with the available experimental data, showing the finite element analysis can predict the final curvatures of the micro-cantilevers properly.