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Beam-induced impurity displacement during channelling measurements on phosphorus diffused silicon

Authors :
R. F. Peart
R. C. Newman
D. J. Stirland
R. W. Bicknell
C. Allen
Source :
Physica Status Solidi (a). 22:K171-K175
Publication Year :
1974
Publisher :
Wiley, 1974.

Subjects

Subjects :
Materials science
Silicon
Phosphorus
Radiochemistry
chemistry.chemical_element
Condensed Matter Physics
Channelling
Electronic, Optical and Magnetic Materials
chemistry
Helium ions
Impurity
Ion channeling
Atomic physics
Displacement (fluid)
Beam (structure)

Details

ISSN :
1521396X and 00318965
Volume :
22
Database :
OpenAIRE
Journal :
Physica Status Solidi (a)
Accession number :
edsair.doi...........c1e57fa91c05dc6652bc8197d1028716

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