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Investigation of the Influence of Buffer Layer on the Interface Roughness of NbC∕Si Multilayer
- Source :
- AIP Conference Proceedings.
- Publication Year :
- 2011
- Publisher :
- AIP, 2011.
-
Abstract
- The influence of buffer layer on interface roughness has been investigated. With Si buffer layer, NbC/Si multilayer mirrors show 28% increase of reflectivity at 1st Bragg peak for 1.54A0. Reduction in physical and chemical roughness in the multilayer with buffer layer was calculated by fitting both specular and diffused scattering data.
Details
- ISSN :
- 0094243X
- Database :
- OpenAIRE
- Journal :
- AIP Conference Proceedings
- Accession number :
- edsair.doi...........c1adc3b4b60c80c08aecb8f5cceba93f
- Full Text :
- https://doi.org/10.1063/1.3606092