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Investigation of the Influence of Buffer Layer on the Interface Roughness of NbC∕Si Multilayer

Authors :
Arijeet Das
S. K. Rai
A. Srivastava
R. Dhawan
G. S. Lodha
S. K. Deb
Alka B. Garg
R. Mittal
R. Mukhopadhyay
Source :
AIP Conference Proceedings.
Publication Year :
2011
Publisher :
AIP, 2011.

Abstract

The influence of buffer layer on interface roughness has been investigated. With Si buffer layer, NbC/Si multilayer mirrors show 28% increase of reflectivity at 1st Bragg peak for 1.54A0. Reduction in physical and chemical roughness in the multilayer with buffer layer was calculated by fitting both specular and diffused scattering data.

Details

ISSN :
0094243X
Database :
OpenAIRE
Journal :
AIP Conference Proceedings
Accession number :
edsair.doi...........c1adc3b4b60c80c08aecb8f5cceba93f
Full Text :
https://doi.org/10.1063/1.3606092