Influence of composition and nanogranular structure of (Co+Fe+Zr)/(ZrO) composite films on conductivity and microwave reflective properties

A comparative study were carried out on composition, nanostructure and conductivity of (Co + Fe + Zr)/(ZrO) amorphous granular composite films deposited on polyethylene terephthalate substrate by ion beam deposition in argon and nitrogen atmosphere. Atomic force microscopy, magnetic force microscopy, energy dispersive analysis and scanning electron microscopy were used. It is shown that the content of the metal phase in the films determines both the average granule sizes and their microwave reflecting and conducting properties. Dependences of granules size, reflection coefficient and conductivity on the metal phase content and film thickness were found. The influence of the metallic phase turns out to be significant in the presence of percolation (flow) processes that arise when the films are deposited.