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Nanosheet Extensions and Beyond

Authors :
Chien-Te Tu
Yi-Chun Liu
Yu-Rui Chen
Bo-Wei Huang
Chun-Yi Cheng
C. W. Liu
Source :
2023 International VLSI Symposium on Technology, Systems and Applications (VLSI-TSA/VLSI-DAT).
Publication Year :
2023
Publisher :
IEEE, 2023.

Details

Database :
OpenAIRE
Journal :
2023 International VLSI Symposium on Technology, Systems and Applications (VLSI-TSA/VLSI-DAT)
Accession number :
edsair.doi...........c1187348fbb2f53a275606d544431a9f