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Analytical Study of the Film Bulk Acoustic Resonators Based on Single Crystal LiNbO3 with Different Crystal Orientations

Authors :
Jikui Luo
Weipeng Xuan
Feng Gao
Hao Jin
Jinkai Chen
Xingli He
Shurong Dong
Ting Wu
Xiaozhi Wang
Source :
Integrated Ferroelectrics. 213:182-193
Publication Year :
2021
Publisher :
Informa UK Limited, 2021.

Abstract

Film bulk acoustic resonator (FBAR) based on single crystal LiNbO3 are promising for next-generation high Q, wideband filters in telecommunications. The crystal orientation of LiNbO3 has significan...

Details

ISSN :
16078489 and 10584587
Volume :
213
Database :
OpenAIRE
Journal :
Integrated Ferroelectrics
Accession number :
edsair.doi...........c0dfce8db24a7e51e5af36896ea85cf9
Full Text :
https://doi.org/10.1080/10584587.2020.1859837