Structural and analytical characterization of Si1-x Gex /Si heterostructures by Rutherford backscattering spectrometry and channeling, analytical electron microscopy and double crystal X-ray diffractometry

Authors :: Roberto Balboni
Antonio Drigo
Antonella Guerrieri
Franco Cembali
Franco Corticelli
Subramanian S. Iyer
Marco Servidori
Rodolfo Rosa
Stefano Frabboni
M. Mazzer
Donato Govoni
Filippo Romanato
Aldo Armigliato
Rita Fabbri
Source :: Microscopy Microanalysis Microstructures. 3:363-384
Publication Year :: 1992
Publisher :: EDP Sciences, 1992.

Subjects :: Analytical electron microscopy
Materials science
Electron diffraction
Analytical chemistry
X-ray
Double crystal
Heterojunction
Thin film
Rutherford backscattering spectrometry
Instrumentation
Characterization (materials science)

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