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Monolithically Integrated Inertial Sensors
- Source :
- CMOS - MEMS
- Publication Year :
- 2005
- Publisher :
- Wiley, 2005.
Details
- ISSN :
- 18653715
- Database :
- OpenAIRE
- Journal :
- Advanced Micro and Nanosystems
- Accession number :
- edsair.doi...........bfdf4de03b9e61fe2cdd657ed00749cb