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Monolithically Integrated Inertial Sensors

Authors :
Junseok Chae
Steve Lewis
Timothy J. Denison
Jinbo Kuang
Gary K. Fedder
Haluk Kulah
Khalil Najafi
Source :
CMOS - MEMS
Publication Year :
2005
Publisher :
Wiley, 2005.

Subjects

Subjects :
Materials science
law
Inertial measurement unit
business.industry
Electrical engineering
Gyroscope
Accelerometer
business
law.invention

Details

ISSN :
18653715
Database :
OpenAIRE
Journal :
Advanced Micro and Nanosystems
Accession number :
edsair.doi...........bfdf4de03b9e61fe2cdd657ed00749cb

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