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Stacked SOI layers obtained by zone melting recrystallization
- Source :
- 1990 IEEE SOS/SOI Technology Conference. Proceedings.
- Publication Year :
- 2002
- Publisher :
- IEEE, 2002.
-
Abstract
- The authors report on lamp heated ZMR (zone melting recrystallization) of two silicon layers, stacked on top of each other and separated by an oxide layer in between. A 1.5- mu m thermal oxide was grown on
Details
- Database :
- OpenAIRE
- Journal :
- 1990 IEEE SOS/SOI Technology Conference. Proceedings
- Accession number :
- edsair.doi...........bfd403353b0ed686766bbcdad2469c56