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Simple nanoindentation-based method for determining linear thermal expansion coefficients of micro-scale materials
- Source :
- Journal of Materials Research. 35:3202-3209
- Publication Year :
- 2020
- Publisher :
- Springer Science and Business Media LLC, 2020.
-
Abstract
- The thermal expansion coefficient (CTE) is a vital design parameter for reducing the thermal-stress-induced structural failure of electronic chips/devices. At the micro- and nano-scale, the typical size range of the components in chips/devices, the CTEs are probably different from that of the bulk materials, but an easy and accurate measurement method is still lacking. In this paper, we present a simple but effective method for determining linear CTEs of micro-scale materials only using the prevalent nanoindentation system equipped with a heating stage for precise temperature control. By holding a constant force on the sample surface, while heating the sample at a constant rate, we measure two height–temperature curves at two positions, respectively, which are close to each other but at different heights. The linear CTE is obtained by analyzing the difference of height change during heating. This method can be applied to study the size effect or surface effect of CTE of embedded micro-scale structures, aiding the failure analysis and structural design in the semiconductor industry.
- Subjects :
- Imagination
Temperature control
Materials science
Chemical substance
Scale (ratio)
Mechanical Engineering
media_common.quotation_subject
02 engineering and technology
Nanoindentation
010402 general chemistry
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Thermal expansion
0104 chemical sciences
Mechanics of Materials
Range (statistics)
General Materials Science
Composite material
0210 nano-technology
Science, technology and society
media_common
Subjects
Details
- ISSN :
- 20445326 and 08842914
- Volume :
- 35
- Database :
- OpenAIRE
- Journal :
- Journal of Materials Research
- Accession number :
- edsair.doi...........bf6daf7e6c2666d5c548dc81cf989d2b