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Thin-film electro-acoustic sensors based on AlN and its alloys: possibilities and limitations
- Source :
- Microsystem Technologies. 18:1213-1223
- Publication Year :
- 2012
- Publisher :
- Springer Science and Business Media LLC, 2012.
-
Abstract
- Sputter deposited aluminum nitride (AlN) thin films have played a central role for the successful development of the thin film electro-acoustic technology. The development has been primarily driven by one device—the thin film bulk acoustic resonator, with its primary use for high frequency filter applications for the telecom industry. Recently, increased piezoelectric properties in AlN through the alloying with scandium nitride have been identified both experimentally and theoretically. This opens up new possibilities for the thin film electro-acoustic technology. Here expectations and discussions are presented on acoustic FBAR sensor performance when based on AlN as well as on such AlN alloys to identify possible benefits and limitations. Inhere, the distinction is made between direct and in-direct (acoustic) use of the piezoelectric effect for sensor applications. These two approaches are described and compared in view of their advantages and possibilities. Especially, the indirect (or acoustic) use is identified as interesting for its versatility and good exploitation of the thin film technology to obtain highly sensitive sensor transducers. It is pointed out that the indirect approach can well be obtained internally in the piezoelectric material structure. Original calculations are presented to support the discussion.
- Subjects :
- Scandium nitride
Materials science
chemistry.chemical_element
Thin-film bulk acoustic resonator
Nitride
Condensed Matter Physics
Piezoelectricity
Engineering physics
Electronic, Optical and Magnetic Materials
Transducer
chemistry
Hardware and Architecture
Aluminium
Sputtering
Electronic engineering
Electrical and Electronic Engineering
Thin film
Subjects
Details
- ISSN :
- 14321858 and 09467076
- Volume :
- 18
- Database :
- OpenAIRE
- Journal :
- Microsystem Technologies
- Accession number :
- edsair.doi...........be4fe0026fa4be495c7eb70d9440116e