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36.3: High Quality Poly‐Si Crystallized at 400 °C by Field Enhanced SMC
- Source :
- SID Symposium Digest of Technical Papers. 31:920-923
- Publication Year :
- 2000
- Publisher :
- Wiley, 2000.
-
Abstract
- A-Si layer was crystallized at a temperature of 400 °C in the presence of a modest electric field of 100 V/cm. An accumulation of needlelike crystallites in the crystallized poly-Si has been found after crystallization. This results from the migration of NiSi2 precipitates through a-Si. The field effect mobility and threshold voltage for a SMC poly-Si TFT using a maximum process temperature of 400 °C were 76 cm2/Vs and 0.8 V, respectively. The performance of a SMC poly-Si TFT is comparable to that of an ELA poly-Si TFT.
Details
- ISSN :
- 21680159 and 0097966X
- Volume :
- 31
- Database :
- OpenAIRE
- Journal :
- SID Symposium Digest of Technical Papers
- Accession number :
- edsair.doi...........be288791aec4a32a9edd86f98965e1fa