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Fabrication of micro-optical magnetic sensor
- Source :
- 2017 Photonics North (PN).
- Publication Year :
- 2017
- Publisher :
- IEEE, 2017.
-
Abstract
- In this work, we report the micro fabrication of several types of resonant micro magnetic field sensors where we can use an optical technique to read the magnetic variations (MOEMS). The fabrication process we have used, is a simple process in a SOI wafer with 6 μm of active layer and 5 μm of sacrificial SiO2.
Details
- Database :
- OpenAIRE
- Journal :
- 2017 Photonics North (PN)
- Accession number :
- edsair.doi...........bdf7561301f8153370018bb6ea455c32