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Inhibitor-Free Area-Selective Atomic Layer Deposition with Feature Size Down to Nearly 10 nm
- Source :
- Chemistry of Materials. 35:1107-1115
- Publication Year :
- 2023
- Publisher :
- American Chemical Society (ACS), 2023.
- Subjects :
- General Chemical Engineering
Materials Chemistry
General Chemistry
Subjects
Details
- ISSN :
- 15205002 and 08974756
- Volume :
- 35
- Database :
- OpenAIRE
- Journal :
- Chemistry of Materials
- Accession number :
- edsair.doi...........bdcf49665254a205104c80e78a613e9d