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Dislocation-related photoluminescence imaging of mc-Si wafers at room temperature

Authors :
Reiner P. Schmid
T. Arguirov
Martin Kittler
D. Mankovics
Source :
Crystal Research and Technology. 47:1148-1152
Publication Year :
2012
Publisher :
Wiley, 2012.

Abstract

We report on a method for fast detection of defect rich areas in multicrystalline silicon solar wafers. It is based on photoluminescence imaging of the whole wafers and detects both the band-to-band radiation as well as the dislocation specific radiation D1. To illustrate the capabilities of the method we examined 5.0 × 5.0 cm2 wafer pieces in different stages of their processing. The achieved resolution of the D1 images was ∼120 μm, within a total recording time of 550 ms.

Details

ISSN :
02321300
Volume :
47
Database :
OpenAIRE
Journal :
Crystal Research and Technology
Accession number :
edsair.doi...........bdac7c2751f2f29d246c991c283285dd