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5AM2-C-3 Development of MEMS Vibration Energy Harvester with Soft-X-ray-charged Vertical Electrets

Authors :
Qianyan Fu
Yuji Suzuki
Source :
The Proceedings of the Symposium on Micro-Nano Science and Technology. :5-6
Publication Year :
2013
Publisher :
Japan Society of Mechanical Engineers, 2013.

Subjects

Subjects :
Microelectromechanical systems
Vibration
Soft x ray
Materials science
business.industry
Optoelectronics
Electret
business
Energy harvester

Details

ISSN :
24329495
Database :
OpenAIRE
Journal :
The Proceedings of the Symposium on Micro-Nano Science and Technology
Accession number :
edsair.doi...........bd8e49ed5683886063d743323c339bef
Full Text :
https://doi.org/10.1299/jsmemnm.2013.5.5
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