Transmission Electron Microscopy Study of UV-ozone Cleaned Silicon Surfaces for Application in High Efficiency Photovoltaics

Authors :: Ngwe Zin
Kristopher O. Davis
Sara Bakhshi
Winston V. Schoenfeld
Munan Gao
Haider Ali
Source :: 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC).
Publication Year :: 2019
Publisher :: IEEE, 2019.
Abstract: The focus of this work is on the characterization of passivated crystalline Si (c-Si) surfaces subjected to various cleaning sequences involving UV ozone (UVo) treatment and HF-dip. A combination of photoconductance decay (PCD) measurements and high-resolution transmission electron microscopy (HRTEM) studies were used to obtain a deeper insight into passivation mechanisms of UVo and its origin at the nano-scale.

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