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Design of X-ray super-mirrors using simulated annealing algorithm
- Source :
- Optics Communications. 265:197-206
- Publication Year :
- 2006
- Publisher :
- Elsevier BV, 2006.
-
Abstract
- An adaptive local search-based simulated annealing (ALSA) algorithm is proposed for the design of the wide band-pass multilayer optical elements operating in the hard and soft X-ray wavelength ranges. At present the SA algorithm has been kept as simple as possible and its performance is being studied before a series of modifications are made to tailor the SA algorithm to optimize super-mirror for particular applications. The algorithm has also been developed with two specific areas in mind: a W/C broad angle super-mirror for hard X-ray applications and a Mo/Si wide band super-mirror operating at normal incidence in the EUV spectral region. The design results show that the ALSA algorithm method has the flexibility to design a wide range of multilayer structures and in comparison to other techniques has good results although computationally more intensive.
- Subjects :
- Physics
Series (mathematics)
business.industry
Extreme ultraviolet lithography
X-ray optics
Inverse problem
Adaptive simulated annealing
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
Wavelength
Optics
Simulated annealing
Local search (optimization)
Electrical and Electronic Engineering
Physical and Theoretical Chemistry
business
Subjects
Details
- ISSN :
- 00304018
- Volume :
- 265
- Database :
- OpenAIRE
- Journal :
- Optics Communications
- Accession number :
- edsair.doi...........bd6b007aa03231ab013f81424d3fe9ef