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Glassy free-form 3D micro-optics enabled via ultrafast laser 3D nanolithography

Authors :
Meguya Ryu
Junko Morikawa
Greta Merkininkaite
Mangirdas Malinauskas
Simas Sakirzanovas
Saulius Juodkazis
Simonas Varapnickas
Tai Suzuki
Darius Gailevičius
Source :
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV.
Publication Year :
2021
Publisher :
SPIE, 2021.

Abstract

Here we report on the laser manufacturing of glass true 3D micro-optics. We demonstrate the feasibility of producing individual free-form geometry elements such as lenses, prisms, gratings proving the potential of integration into monolith stacked components. This is achieved by combining ultrafast laser 3D nanolithography and subsequent thermal post-treatment (calcination) - a novel approach introduced for additive manufacturing of inorganic materials [Nanoscale Horiz. 4, 647 (2019)]). The laser made pristine micro-optical components maintain their predefined shape while material is converted from hybrid polymer to glass corresponding to its inherent refractive index and transparency. This approach enables both realization of complex geometries and variation of material properties simultaneously.

Details

Database :
OpenAIRE
Journal :
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV
Accession number :
edsair.doi...........bcc1c4e717502d082fd125b180a2a9e9