CMOS-Compatible Contacts for Si Photonics from Solid-State Reaction to Laser Integration

Authors :: Patrice Gergaud
Laura Toselli
M. Pasquali
Christophe Jany
E. Ghegin
Ph. Rodriguez
Saddek Bensalem
S. Favier
Fabrice Nemouchi
Bertrand Szelag
S. Zhiou
Source :: 2018 IEEE International Interconnect Technology Conference (IITC).
Publication Year :: 2018
Publisher :: IEEE, 2018.
Abstract: From surface preparation and solid-state reaction to laser integration, a short overview of the CMOS-compatible contacts developed in our group on n-InP and p-InGaAs for Si photonic applications is proposed.

Database :: OpenAIRE
Journal :: 2018 IEEE International Interconnect Technology Conference (IITC)
Accession number :: edsair.doi...........bc98ae434d3886b785f11a4949430696
Full Text :: https://doi.org/10.1109/iitc.2018.8430397

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