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Liquid-Phase Deposition of Low-K Organic Silicon-Oxide Films
- Source :
- MRS Proceedings. 511
- Publication Year :
- 1998
- Publisher :
- Springer Science and Business Media LLC, 1998.
-
Abstract
- Low-K silica films were grown from the liquid phase using methyl-triethoxy-silane. Physical and chemical properties were investigated together with electronic properties. The film had dense methyl groups and showed insulating characteristics even under as-grown conditions. The dielectric constant, low-field resistivity and breakdown field-strength were 3.6, 1013 Ωcm and IMV/cm, respectively, for the as-grown film. They were improved to 2.6, more than 1015 Ωcm and more than 3MV/cm, respectively, after 300°C vacuum annealing
Details
- ISSN :
- 19464274 and 02729172
- Volume :
- 511
- Database :
- OpenAIRE
- Journal :
- MRS Proceedings
- Accession number :
- edsair.doi...........bc67ad0fb5537b8357d1f828d619706a