偏心双转子运动抛光工艺研究及中频误差的抑制研究

Authors :: 董子铭 Dong Ziming
章亚男 Zhang Yanan
刘志刚 Liu Zhigang
焦翔 Jiao Xiang
朱健强 Zhu Jianqiang
崔文辉 Cui Wenhui
林炜恒 Lin Weiheng
Source :: Chinese Journal of Lasers. 48:2402001
Publication Year :: 2021
Publisher :: Shanghai Institute of Optics and Fine Mechanics, 2021.

Subjects :: Electrical and Electronic Engineering
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials

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