Back to Search
Start Over
Plan View Specimen Preparation Via Vacuum Assisted Ex Situ Lift Out
- Source :
- International Symposium for Testing and Failure Analysis.
- Publication Year :
- 2018
- Publisher :
- ASM International, 2018.
-
Abstract
- Vacuum assisted ex situ lift out may be used for fast, easy, and reproducible plan view specimen preparation. Manipulation of samples via beveled hollow glass probes whose plane of interest is parallel to slotted grids allow for conventional FIB milling for S/TEM analysis.
Details
- ISSN :
- 08901740
- Database :
- OpenAIRE
- Journal :
- International Symposium for Testing and Failure Analysis
- Accession number :
- edsair.doi...........bc4d242406e7b5f7e34e948d757c1765