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Three-Dimensional Micromachining of PTFE Using Synchrotron Radiation Light

Authors :
N. Nishi
Takanori Katoh
Susumu Sugiyama
Hiroshi Ueno
Source :
IEEJ Transactions on Sensors and Micromachines. 121:204-208
Publication Year :
2001
Publisher :
Institute of Electrical Engineers of Japan (IEE Japan), 2001.

Subjects

Subjects :
Surface micromachining
Materials science
Optics
business.industry
Mechanical Engineering
Synchrotron radiation
Electrical and Electronic Engineering
business

Details

ISSN :
13475525 and 13418939
Volume :
121
Database :
OpenAIRE
Journal :
IEEJ Transactions on Sensors and Micromachines
Accession number :
edsair.doi...........bc26947320c93cb174307c4d1806f978

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