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A novel green chemical mechanical polishing for potassium dihydrogen phosphate using corn oil slurry

Authors :
X. Cui
Z. Zhang
C. Shi
F. Meng
G. Xu
W. Xie
Z. Liu
J. Wang
W. Wen
Source :
Materials Today Sustainability. 20:100257
Publication Year :
2022
Publisher :
Elsevier BV, 2022.

Details

ISSN :
25892347
Volume :
20
Database :
OpenAIRE
Journal :
Materials Today Sustainability
Accession number :
edsair.doi...........bae39841009b37afbe99e34c517b9431