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A novel green chemical mechanical polishing for potassium dihydrogen phosphate using corn oil slurry
- Source :
- Materials Today Sustainability. 20:100257
- Publication Year :
- 2022
- Publisher :
- Elsevier BV, 2022.
Details
- ISSN :
- 25892347
- Volume :
- 20
- Database :
- OpenAIRE
- Journal :
- Materials Today Sustainability
- Accession number :
- edsair.doi...........bae39841009b37afbe99e34c517b9431