Investigation of structural and optical properties of Ag nanoclusters formed in Si(100) after multiple implantations of low energies Ag ions and post-thermal annealing at a temperature below the Ag-Si eutectic point

Authors :: Bibhudutta Rout
Floyd D. McDaniel
Mangal Dhoubhadel
Sushanta K. Das
Francis D'Souza
Wickramaarachchige J. Lakshantha
Gary A. Glass
Source :: AIP Conference Proceedings.
Publication Year :: 2014
Publisher :: American Institute of Physics, 2014.
Abstract: This paper investigates the synthesis of Ag NCs in Si(100) substrate by implanting multiple energies and fluences of Ag ions and subsequent thermal annealing.

Subjects :: Materials science
Ion implantation
X-ray photoelectron spectroscopy
Metallurgy
Physical chemistry
Substrate (electronics)
Ion
Eutectic system
Nanoclusters

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