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Reliable Characterization of e-beam Evaporated TiO_2 Films

Authors :
Tatiana V. Amotchkina
Michael K. Trubetskov
Vladimir Pervak
Alexander V. Tikhonravov
I. Angelov
Source :
Optical Interference Coatings.
Publication Year :
2013
Publisher :
OSA, 2013.

Abstract

We study TiO2 films deposited at different substrate temperatures. The films are carefully characterized on the basis of in situ and ex situ measurements. The results will be useful for further laser-induced damage threshold investigations.

Subjects

Subjects :
In situ
Materials science
Carbon film
business.industry
Electron beam processing
Optoelectronics
Nanotechnology
Substrate (electronics)
Thin film
business
Refractive index
Characterization (materials science)

Details

Database :
OpenAIRE
Journal :
Optical Interference Coatings
Accession number :
edsair.doi...........b9aab2c7b54d4d82f6fd4d1be18883e7
Full Text :
https://doi.org/10.1364/oic.2013.fa.6
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