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Pull-In Dynamic of electrostatically-Actuated Beams

Authors :
Stephen D. Senturia
G. K. Ananthasuresh
Raj Kumar Gupta
Elmer S. Hung
Yao-Joe Yang
Source :
1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Publication Year :
1996
Publisher :
Transducer Research Foundation, Inc., 1996.

Details

Database :
OpenAIRE
Journal :
1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest
Accession number :
edsair.doi...........b9a75f9eb4fb485efbfc43a2255064e0
Full Text :
https://doi.org/10.31438/trf.hh1996a.1