Quantitative Analysis of Metal Film by Laser-Induced Breakdown Spectroscopy (LIBS)

The plasma was generated by focusing a pulsed Nd:YAG laser at 1064nm and 10ns on the surface of ITO. We investigated the relationship between the signal intensity of LIBS and the pulse energy of laser, and found the signal of the analyze lines of In and Sn increased with the laser energy enhanced proportional. A series of measurements were made to found the optimum time delay between the laser pulse and the beginning of the LIBS spectra acquisition. Through calibration-free method we obtain the temperature of plasma,at the same time we measured the content of In and Sn by the program which writed with matlab.