X-Ray Detection Using Superconducting Tunnel Junctions With Polyimide Insulation Layer

We have fabricated Nb-based superconducting tunnel junctions (STJs) with Al trapping layers using the photosensitive polyimide insulation layer for X-ray detector. It is possible to simplify the fabrication process of the STJs, because the photosensitive polyimide is used as the insulation layer instead of conventional inorganic insulation films without an etching process in a vacuum chamber. The polyimide insulation layer expects to be stable for thermal cycling between 0.3 K and room temperature. The preliminary experiments of 5.9 keV radiation shows the energy resolution of 86 eV.