Cite
Effect of annealing process on the surface roughness in multiple Al implanted 4H-SiC
MLA
Liu Xingfang, et al. “Effect of Annealing Process on the Surface Roughness in Multiple Al Implanted 4H-SiC.” Journal of Semiconductors, vol. 32, July 2011, p. 072002. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........b8b66af824a63ece0622465e368eabe6&authtype=sso&custid=ns315887.
APA
Liu Xingfang, Yan Guoguo, Zhao Wanshun, Wu Hailei, Wen Jialiang, Wang Lei, Yang Ting, Sun Guosheng, & Zeng Yiping. (2011). Effect of annealing process on the surface roughness in multiple Al implanted 4H-SiC. Journal of Semiconductors, 32, 072002.
Chicago
Liu Xingfang, Yan Guoguo, Zhao Wanshun, Wu Hailei, Wen Jialiang, Wang Lei, Yang Ting, Sun Guosheng, and Zeng Yiping. 2011. “Effect of Annealing Process on the Surface Roughness in Multiple Al Implanted 4H-SiC.” Journal of Semiconductors 32 (July): 072002. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.doi...........b8b66af824a63ece0622465e368eabe6&authtype=sso&custid=ns315887.